| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of reducing zero-point variation by preventing saturation of a charge/voltage conversion and buffer amplifier while using a simple circuit structure to thereby improve angular velocity measurement accuracy. SOLUTION: The angular velocity sensor includes detection units 26a, 26b, 26c, 26d from the inner circumferential part to the outer circumferential part of a flexible part 22. The widths of the detection units 26a, 26b, 26c, 26d are increased in accordance with a distance from the center of a pts.mass part 23 so that charge components of the detection units 26a, 26b, 26c, 26d not arising from Coriolis force are canceled or extremely reduced. COPYRIGHT: (C)2011,JPO&INPIT
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