发明名称 SLIDE TABLE DEVICE FOR OPTICAL DISK MASTERING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To obtain a slide table device for an optical disk mastering device capable of performing the high density write-in by stably feeding without causing the irregularity of speed and also improving the resolution while withstanding the external disturbance. SOLUTION: A slide body 3 forming the table is supported with static pressure by a static pressure straight motion bearing 2 with respect to a base 1, and a frictional forward/backward driving device 4 is provided for driving the slide body 3 so as freely to slide with respect to the base 1. The frictional forward/backward driving device 4 is furnished with a rotationally driven spindle 5 and rollers 9 which are provided around this spindle 5 in plural numbers and brought in contact therewith taking the respective inclined angles. A pressurizing means 15A is provided for these rollers 9 to impart the preload to the spindle 5.</p>
申请公布号 JPH11195247(A) 申请公布日期 1999.07.21
申请号 JP19970331535 申请日期 1997.12.02
申请人 NTN CORP 发明人 MIYAKE TORU;OKADA MANABU
分类号 G01B11/00;F16H19/02;G11B7/26;H01L21/68;(IPC1-7):G11B7/26 主分类号 G01B11/00
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