| 摘要 |
A micro-gyro device is disclosed combining a first element (20) which oscillates linearly in a plane along a first direction (y), and second element (24) which oscillates linearly in the same plane along a second direction (x) perpendicular to the first direction, so arranged that Coriolis force is transmitted from one element to the other without any substantial transfer of motion of either element to the other in its own direction of motion. In other words, the masses of the two elements (20, 24) operate independently of one another, providing improved performance, and individual adjustability to compensate for any manufacturing imprecision. The rate axis, around which is measured angular speed of the micro-gyro device due to exterior forces, is perpendicular to the plane of the first and second elements (20, 24). The presently-preferred device combines an outer rectangular ring (20), which oscillates along the drive direction, with an inner plate (24), which oscillates along the sensing direction, whenever external rotating motion occurs about the rate axis. A unitary micro-gyro structure is disclosed in which a monolithic substrate (28) supports three micro-gyro devices (102, 104, 106), each of which measures angular speed of the structure around a different rate axis, which is perpendicular to each of the other two rate axes. |
