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发明名称
METHOD OF MANUFACTURING FINE CONTACT HOLE IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100197657(B1)
申请公布日期
1999.06.15
申请号
KR19950066110
申请日期
1995.12.29
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
KIM, SEUK-SOO;KIM, JIN-BAE
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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