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发明名称
Verfahren zur Herstellung von Sacklöchern und hergestellte Struktur
摘要
申请公布号
DE69228099(T2)
申请公布日期
1999.05.20
申请号
DE1992628099T
申请日期
1992.09.08
申请人
SGS-THOMSON MICROELECTRONICS, INC., CARROLLTON, TEX., US
发明人
CHEN, FUSEN E., MILPITAS, CA 95035, US;LIOU, FU-TAI, DENTON COUNTY, TEXAS 75015, US;DIXIT, GIRISH A., DALLAS, DENTON COUNTY, TEXAS 75287, US
分类号
H01L21/768;H01L23/522;(IPC1-7):H01L21/768;H01L23/485
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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