| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide the manufacturing method of an anode of an organic EL element with low resistivity, capable of realizing a wide screen, a complicated luminescent pattern, and a high precise screen when applied to a display, and provide the manufacturing device and the anode. SOLUTION: In the manufacturing method of an anode of an organic EL element, having a target 2 and a substrate 1 and formed on the substrate 1 by sputtering method, the substrate 1 is arranged within the range of an elevation angle of 45-80 deg. to the surface the target 2 based on the edge near to the center of the substrate 1 of the target 2, and at least the surface of the anode is formed as a film.</p> |
