| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer holding plate on which a marking which can be surely detected by a sensor and which has no affect on products, is placed. SOLUTION: A marking M is placed on the joint surface side of a circular template 2 stuck on a circular plate 1 made of a hard and brittle material, or a circular plate 1, and the circular template 2 is made of transparent or semitransparent resin template so that it can be detected by a photosensor. Thus, the marking M part is sandwiched between the hard and brittle plate 1 and the template 2 not to be exposed to the front surface on the side of the surface to be polished. |
