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发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPH1187098(A)
申请公布日期
1999.03.30
申请号
JP19970238407
申请日期
1997.09.03
申请人
TOSHIBA CORP
发明人
YAMAZAKI OSAMU;FUJIMOTO SHIGERU;SUGAI HIDEO;YAMAHANA MASASHI
分类号
H05H1/46;C23C16/44;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H05H1/46;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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