发明名称 COATING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To enable application of a fixed amt. of Ag paste, irrespective of the inclination and deformation of islands on a lead frame to eliminate restrictions on the island fixing method, depending on the material of the lead frame by providing a coater having support members, nozzles and retain pins movable together up and down. SOLUTION: Retainer pins for correcting the inclination or deformation of islands 5 of a lead frame and pressing them to a mount stage 4 are disposed round Ag paste nozzles 2 for jetting an Ag paste 3 charged therein from the top ends by the pressure of air, etc. This process is executed, irrespective of the material of the lead frame about the content. The pins 1 and nozzles 2 supported and secured by support members 10 are moved up and down together and the top end of the pin 1 extrudes by specified distance G from the top end of the nozzle 2.
申请公布号 JPH1167796(A) 申请公布日期 1999.03.09
申请号 JP19970226760 申请日期 1997.08.22
申请人 NEC YAMAGATA LTD 发明人 ITAGAKI TAKASHI
分类号 B05D3/00;B05C5/00;B05D7/24;H01L21/52;(IPC1-7):H01L21/52 主分类号 B05D3/00
代理机构 代理人
主权项
地址