| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrostatic magnetic composite bearing to have excellent dynamic rigidity of a hydrostatic bearing, rotation precision, and excellent static rigidity of a magnetic bearing and be formed in a compact manner and to provide a spindle device. SOLUTION: A hydrostatic bearing l9 and a magnetic bearing 8 are integrally formed to form a hydrostatic magnetic composite bearing 3. The hydrostatic magnetic composite bearing 3 and a built-in type motor 5 are combined together to form a spindle device 1. The hydrostatic magnetic composite bearing 3 is provided at the internal part of the stator core 13 of the magnetic bearing 8 with the air supply passage of the hydrostatic bearing 9 and an autogenous throttling 15. This constitution uses the parts of the magnetic bearing 8 are the hydrostatic bearing 9 as both and uses a hydrostatic bearing gas (d) and a magnetic gap in combination, and forms a device in a compact manner. This hydrostatic magnetic composite bearing is also applicable for an axial bearing in addition to a radial bearing. |
