Capacitance element and method of manufacturing the same

摘要

On a substrate (1), there are provided a lower electrode (2), a capacitance insulating film (3), a passivation insulating film (6), and a first partial film (7a) of an upper electrode (7) to be filled in a second aperture (capacitance determining aperture) formed in the passivation insulating film (6). The lower electrode (2), the capacitance insulating film (3), and the first partial film (7a) constitute a capacitance element. The upper electrode has the first partial film which is in contact with the capacitance insulating film (3) and a second partial film (7b) which is not in contact with the capacitance insulating film (3). A second electrode wire (11) consisting of a lower-layer film composed of titanium (11a) and an upper-layer film composed of an aluminum alloy film (11b) is in contact with the second partial film distinct from the first partial film of the upper electrode.