| 发明名称 |
METHOD FOR PRODUCING COATED WORKPIECES, USES AND INSTALLATION FOR THE METHOD |
| 摘要 |
The method is characterized in that layers of sufficient quality for epitaxy are placed on workpieces, at a considerably increased deposition rate. To this end, instead of a UHV-CVD or ECR-CVD method, for example, a PECVD method is used by means of a DC plasma discharge. |
| 申请公布号 |
WO9858099(A1) |
申请公布日期 |
1998.12.23 |
| 申请号 |
WO1998CH00221 |
申请日期 |
1998.05.27 |
| 申请人 |
BALZERS HOCHVAKUUM AG;VON KAENEL, HANS;ROSENBLAD, CARSTEN;RAMM, JUERGEN |
发明人 |
VON KAENEL, HANS;ROSENBLAD, CARSTEN;RAMM, JUERGEN |
| 分类号 |
C23C16/503;C23C16/505;C23C16/511;C30B25/02;C30B25/10;C30B29/52;H01J37/32;H01L21/205 |
主分类号 |
C23C16/503 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
