发明名称 |
Method for wavelength compensation in semi conductor manufacturing |
摘要 |
The present invention relates to a method for manufacturing a plurality of semiconductor photonic integrated circuit comprising at least a laser and a modulator connected optically to one another. Each laser and modulator has a waveguide layer being implemented on a single substrate, where said modulator is formed by use of a selective area growth technique. By providing modulator masking parts with selectable width to compensate a difference in band-gap energy in the waveguide layer between the laser and the modulator a approximate uniform difference in band-gap energy between the optically connected laser and modulator may be obtained. |
申请公布号 |
SE9804422(D0) |
申请公布日期 |
1998.12.18 |
申请号 |
SE19980004422 |
申请日期 |
1998.12.18 |
申请人 |
TELEFONAKTIEBOLAGET L M ERICSSON |
发明人 |
ESKIL *BENDZ;LENNART *LUNDQVIST |
分类号 |
H01L33/00;H01S5/026;H01S5/20;(IPC1-7):H01L/ |
主分类号 |
H01L33/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|