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发明名称
Verfahren zur Herstellung von Schichten aus Bornitrid und danach hergestellte Schichten
摘要
申请公布号
DE69505737(D1)
申请公布日期
1998.12.10
申请号
DE19956005737
申请日期
1995.06.06
申请人
FORD-WERKE AG, 50735 KOELN, DE
发明人
TAMOR, MICHAEL ALAN, TOLEDO, OHIO 43617, US;VASSELL, WILLIAM CHRIS, BLOOMFIELD, MICHIGAN 48301, US
分类号
C23C14/06;C23C14/32;C23C16/34;C23C16/38;C23C16/50;(IPC1-7):C23C16/34
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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