| 摘要 |
<p>PROBLEM TO BE SOLVED: To manufacture a TFT array substrate excellent in a display quality, capable of lowering power consumption and provided with auxiliary capacitance wirings by photoengraving processes of five times. SOLUTION: Gate wirings 1 and auxiliary capacitance wirings 3 are formed with a first metal on an insulating substrate, then, first insulating films, semiconductor active films and ohmic contact films are formed, the semiconductor active films and the ohmic contact films are patterned, succeedingly, source wirings 7, source electrodes 8, drain electrodes 9 and assembled leader wirings 10 are formed with a second metal, thereafter ohmic films of TFT channel parts are eliminated, then, second insulating film are formed, contact holes are formed at pixel contact parts 12, auxiliary capacitance wiring connection parts 13 and set leader wiring connection parts 14, then, conductive films are formed and pixel electrodes 17, auxiliary capacitance wirings and assembled leader wiring connection patterns 18 are formed.</p> |
