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发明名称
LOADLOCK ASSEMBLY FOR AN ION IMPLANTATION SYSTEM
摘要
申请公布号
EP0880792(A1)
申请公布日期
1998.12.02
申请号
EP19970906646
申请日期
1997.02.14
申请人
EATON CORPORATION
发明人
ROSE, PETER, JOHN;BRAILOVE, ADAM, A.
分类号
C23C14/48;H01J27/14;H01J37/08;H01J37/18;H01J37/20;H01J37/30;H01J37/317;H01L21/00;H01L21/265;H01L21/677;H01L21/683;(IPC1-7):H01J37/18
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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