发明名称 |
SUBSTRATE COOLING APPARATUS |
摘要 |
A substrate cooling apparatus is provided with a cooling plate disposed in a treating chamber and Peltier elements for supporting and cooling a substrate. A target temperature setter is operable to set a target temperature to which the substrate is to be cooled and a drive device drives the Peltier elements to cool the cooling plate below the target temperature. When the substrate is found to have reached the target temperature, the substrate is raised to a position free from the thermal influence of the cooling plate, to complete a cooling treatment. Consequently, the substrate is cooled at high speed to achieve a reduced cooling time. Where predetermined process modules are used, processing efficiency is improved with a reduced number of substrate cooling elements. |
申请公布号 |
KR0152118(B1) |
申请公布日期 |
1998.12.01 |
申请号 |
KR19940026022 |
申请日期 |
1994.10.11 |
申请人 |
DAINIPPON SCREEN MFG. CO.,LTD |
发明人 |
MASSUNAGA, MINOBU;TSUJI, MASAO |
分类号 |
G02F1/13;C30B25/12;C30B25/16;F25B21/02;G11B7/26;H01L21/027;H01L21/68;H01L21/683;H01L23/34;H01L23/38;H01L35/32;(IPC1-7):H01L21/68 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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