| 摘要 |
PROBLEM TO BE SOLVED: To make an opening diameter minute, and enable printing and forming of a bump or the like of highly accurate dimensions and configurations by being formed of a rigid metal layer, resin adhesive layer and metal layer in a screen plate having openings for forming a paste bump. SOLUTION: The major part formation of a screen plate 7 is exemplified. These are a first rigid metal layer 4 such as 0.15 mm thick stainless steel, a resin adhesive layer 5 such as epoxy resin, and a second metal layer 6 such as 36μm thick copper foil. Herein, the first metal layer 4 is of the order of 0.2 mm diameter in its openings 4a, and the second metal layer 6 is of the order of 0.1 mm diameter in its openings 6a, and these openings 4a, 6a are, while being connected coaxially, diameter reduced at each part of the adhesive layer 5. Besides, the screen plate has a 500 mm length, a 600 mm width, and 10,000 penetration holes. The surface side of each diameter reduced opening 6a of the screen plate 7 is opposed and arranged on a 18μm thick copper foil surface being set substantially horizontally.
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