| 发明名称 |
Radiantly heated reactor |
| 摘要 |
<p>A reflector array (25) employing a number of linear, tubular heater lamps (27) arranged in a circle concentric with the substrate (5) to be heated. Some of the lamps (27) have focusing reflectors (31) and the remainder have dispersive reflectors. <IMAGE></p> |
| 申请公布号 |
EP0872574(A2) |
申请公布日期 |
1998.10.21 |
| 申请号 |
EP19980110339 |
申请日期 |
1991.08.14 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
ANDERSON, ROGER N.;DEACON, THOMAS E.;CARLSON, DAVID K. |
| 分类号 |
H01L21/205;C23C16/48;H01L21/00;H01L21/22;H01L21/31;(IPC1-7):C23C16/48 |
主分类号 |
H01L21/205 |
| 代理机构 |
|
代理人 |
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| 主权项 |
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| 地址 |
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