| 摘要 |
<p>PROBLEM TO BE SOLVED: To suck and convey a substrate in a condition that it is surely kept into contact with support points, by supporting the substrate by a specific number of support members of equal height, installed on a finger body, and sucking the substrate by a suction pad installed on an almost central part among the support members. SOLUTION: A finger body 1 comprises the first shape part 1a, the second shape part 1b, and at least four overhand parts 1c for supporting the substrate. The overhand parts 1c respectively comprise the support members 2 of equal height, for supporting the substrate. At least one suction pad 3 having the height different from that of the support members 2, is installed on a central line of the first shape part 1a for sucking the substrate. The finger body 1 is fixed to a robot, and is used for, for example, storing a glass substrate in a cassette, or contrary taking the glass substrate out from the cassette. On this occasion, the glass substrate is sucked by the suction pad 3 in a condition that it is surely kept into contact with the support members 2.</p> |
