METHOD AND APPARATUS FOR MEASUREMENT OF INTERFACE STATE DENSITY,申请号JP19970064640-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR MEASUREMENT OF INTERFACE STATE DENSITY
摘要
申请公布号	JPH10260148(A)	申请公布日期	1998.09.29
申请号	JP19970064640	申请日期	1997.03.18
申请人	TOSHIBA CORP	发明人	KOYAMA MASATO
分类号	G01N27/00;H01L21/66;(IPC1-7):G01N27/00	主分类号	G01N27/00
代理机构		代理人
主权项
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