MAGNETIC THIN FILM FOR MAGNETIC HEAD AND PRODUCTION THEREFOR AS WELL AS MAGNETIC HEAD

摘要

PROBLEM TO BE SOLVED: To obtain a magnetic thin film having a large saturation magnetic flux density and high magnetic permeability by incorporating respective specific ratios of aluminum and silicon into an iron alloy layer and forming the layer by vapor deposition in an Ar atmosphere under specific conditions. SOLUTION: The iron alloy film 2 contg. the aluminum and the silicon contains 2 to 6wt.% aluminum and 4 to 8wt.% silicon and is formed by executing the vapor deposition in the gaseous Ar atmosphere at a deposition rate in range of 200 to 500nm/min, under a pressure of the Ar atmosphere at the time of vapor deposition in a range of 1×10<-2> to 5×10<-2> Pa and at 300 to 400 deg.C. The magnetic thin film preferably has the saturation magnetic flux density of 1.4 to 1.6 and saturation magnetostriction of <=2×10<-6> in the absolute value. A protective film 3 of SiO2 which is an insulator is formed on the iron alloy film 2. A ceramic substrate having a coefft. of thermal expansion slightly smaller than the coefft. of thermal expansion of 'SENDUST (R)' is preferably used as a substrate 1.