METHOD AND APPARATUS FOR ELIMINATING REFLECTED ENERGY DUE TO STAGE MISMATCH IN NONLINEAR MAGNETIC COMPRESSION MODULES
摘要
A high voltage pulse power generating circuit capable of eliminating secondary pulses due to stage mismatch in the stages of its magnetic pulse compressor circuit is disclosed. The pulse generating circuit source comprises a high voltage charge storing element (CO) which is periodically discharged into a nonlinear magnetic compressor circuit (16). A mismatch correction circuit (CRn) coupled to each stage of the compressor circuit discharges the reflected energy due to stage mismatch and thus eliminates the reflected energy from being launched back into the load. In a preferred embodiment, the pulse power generating circuit of the present invention utilizes a diode and a resistor that is coupled to each stage of the magnetic pulse compressor circuit (16).
申请公布号
WO9837602(A1)
申请公布日期
1998.08.27
申请号
WO1998US02941
申请日期
1998.02.17
申请人
CYMER, INC.;PARTLO, WILLIAM, N.;SANDSTROM, RICHARD, L.;BIRX, DANIEL, L.;NESS, RICHARD, MONS
发明人
PARTLO, WILLIAM, N.;SANDSTROM, RICHARD, L.;BIRX, DANIEL, L.;NESS, RICHARD, MONS