发明名称 SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device provided with a fuse, which can be manufactured through a short manufacturing process and can be trimmed with a low-energy laser beam. SOLUTION: A pair of conductive films 3 (3A and 3B) formed are flush with a lower insulating film 2 in a state where the films 3A and 3B face opposite to each other, and the spacing L between the films 3A and 3B is made shorter than a thickness t4 of an upper insulating film 4. Therefore, the conductive films 3A and 3B can be trimmed effectively with a laser beam LB, because the beam LB can reach the films 3A and 3B through the upper insulating film 4 and can cause short-circuiting between the films 3A and 3B by fusion, even when the beam LB has small energy.</p>
申请公布号 JPH10229125(A) 申请公布日期 1998.08.25
申请号 JP19970030309 申请日期 1997.02.14
申请人 NEC CORP 发明人 NAGAI NOBUTAKA
分类号 H01L21/82;H01L23/525;(IPC1-7):H01L21/82 主分类号 H01L21/82
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