发明名称 A METHOD FOR FABRICATING A SMALL AREA OF CONTACT BETWEEN ELECTRODES
摘要 <p>An electrode structure for use in a chalcogenide memory is disclosed. The electrode has a substantially frusto-conical shape, and is preferably formed by undercut etching a polysilicon layer beneath an oxide pattern. With this structure, improved current densities through the chalcogenide material can be achieved.</p>
申请公布号 WO1998036446(A2) 申请公布日期 1998.08.20
申请号 US1997017711 申请日期 1997.10.02
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