发明名称 POSITIVE PHOTOSENSITIVE COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide the positive photosensitive composition safe to white light and wide in development latitude and capable of forming a high-contrast image without lowering sensitivity and restraining image blurring due to printing. SOLUTION: This positive photosensitive composition contains a copolymer comprising structural units derived from an additionally polymerizable monomer having a fluoroaliphatic group substituted by fluorine for hydrogen, monomers each represented by the structures of formulae [1]-[4], and monomers represented by the structures of formulae [5]-[8], and these components amounting to >90weight% of the total copolymer components, and in formulae [1]-[8], A is an H or halogen atom or the like; W is an O atom or a -NR3 - group; R1 is an alkylene or arylene group; each of R2 and R3 is an alkyl group or the like; each of R4 -R6 is an alkyl or aryl group; each of Y and Z is an arylene group; X is a bonding group; U is a cyano or aryl group or the like; each of (l) and (m) is 0 or 1; and (n) is 1, 2, or 3.
申请公布号 JPH10207052(A) 申请公布日期 1998.08.07
申请号 JP19970012828 申请日期 1997.01.27
申请人 FUJI PHOTO FILM CO LTD 发明人 KAWAMURA KOICHI;WATANABE NORIAKI
分类号 G03F7/004;G03F7/00;G03F7/022;G03F7/039;H01L21/027 主分类号 G03F7/004
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