Verfahren zur Herstellung von Mustern,申请号DE19916029561-传众专利搜索

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发明名称	Verfahren zur Herstellung von Mustern
摘要
申请公布号	DE69129561(D1)	申请公布日期	1998.07.16
申请号	DE19916029561	申请日期	1991.03.27
申请人	MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., KADOMA, OSAKA, JP	发明人	TAICHI, KOIZUMI, SUMINOE-KU, OSAKA-SHI, JP;TANI, YOSHIYUKI, NEYAGAWA-SHI, JP;MASARU, SASAGO, HIRAKATA-SHI, JP
分类号	G03F7/004;G03F7/022;G03F7/039;G03F7/09;G03F7/105;G03F7/20;G03F7/26;G03F7/38;H01L21/027;H01L21/30;(IPC1-7):G03F7/09	主分类号	G03F7/004
代理机构		代理人
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