发明名称 |
DIAMOND-ON-A-SUBSTRATE FOR ELECTRONIC APPLICATIONS |
摘要 |
<p>A coated substrate product is disclosed which comprises a substrate and a polycrystalline diamond layer having a smooth surface finish, enhanced crystal orientation in comparison to industrial grade diamond powder particularly in the (220) and (400) directions, and excellent electrical and thermal properties. Also disclosed is a method for fabricating such a coated substrate in which the polycrystalline diamond layer is chemically vapor deposited onto the substrate at substrate temperatures in the range of 650 DEG to 825 DEG C.</p> |
申请公布号 |
EP0526468(B1) |
申请公布日期 |
1998.06.17 |
申请号 |
EP19910906651 |
申请日期 |
1991.03.18 |
申请人 |
MONSANTO COMPANY |
发明人 |
GARG, DIWAKAR;TSAI, WILMAN;DYER, PAUL, NIGEL;KIMOCK, FRED, M.;IAMPIETRO, ROBERT, L. |
分类号 |
B32B9/00;B32B15/04;C04B41/85;C23C16/26;C23C16/27;C30B25/10;H01L21/205;H01L23/14;(IPC1-7):B32B9/00;C23C16/32;C23C16/00 |
主分类号 |
B32B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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