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发明名称
ION BEAM WORKING DEVICE
摘要
申请公布号
JPH10140348(A)
申请公布日期
1998.05.26
申请号
JP19960301796
申请日期
1996.11.13
申请人
HITACHI LTD
发明人
NAKAGAWA YUKIO;OISHI SEITARO;TANAKA SHIGERU;ONUKI HISAO
分类号
C23C14/52;(IPC1-7):C23C14/52
主分类号
C23C14/52
代理机构
代理人
主权项
地址
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