发明名称 |
Endpoint detecting apparatus in a plasma etching system |
摘要 |
An apparatus used for detecting the endpoint or described completion point of an etching process has a detection window, an optical cable, and a bracket for fixedly holding the detection window and the optical cable with respect to each other. The detection window protrudes outwardly from a wall of a reaction chamber. The optical cable transmits light generated during an etching process from the detection window to a detecting device separate from the detection chamber. The bracket is attached to the wall of the reaction chamber so as to configure a space between the bracket and the detection window. The configuration reduces the intensity of the electric field formed between the bracket and plasma in the reaction chamber.
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申请公布号 |
US5748297(A) |
申请公布日期 |
1998.05.05 |
申请号 |
US19960761788 |
申请日期 |
1996.12.06 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SUK, JONG-WOOK;PARK, JIN-HO;PARK, SHIN-HYUN;KIM, CHANG-SIK |
分类号 |
H05H1/46;C23F4/00;G01N21/68;H01L21/302;H01L21/3065;H01L21/66;(IPC1-7):G01N21/62 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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