| 摘要 |
PROBLEM TO BE SOLVED: To provide a diffusion-type pressure converter having a small difference in characteristics even to the application of a pressure both in the positive and negative directions, by optimizing an arrangement of a rigid body part and a piezoelectric resistance element and improving sensitivity and linearity. SOLUTION: Two rigid body parts 5 are formed in a longitudinal direction of a diaphragm part 3 at a rear face of the diaphragm part 3 present between end piezoelectric resistance elements R1, R4 and central piezoelectric resistance elements R2, R3. A breadth of a central strain generation area Sc nearly at the center of the diaphragm part 3 held between the rigid body parts 5 or a breadth of each of two end strain generation areas Se at the side of a longer side of the diaphragm part held between each rigid body part 5 and a thick part of a substrate is 100μm or smaller.
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