发明名称
摘要 PURPOSE:To provide a thin resin film with a uniform thickness, excellent in durability and transmittance to rays in far ultraviolet regions, useful for a dust hood in print and exposure units, etc., by dissolving a particular cyanoethylcellulose derivative in a volatile solvent to provide a film by flow casting, etc. CONSTITUTION:A cyanoethylcellulose derivative with a degree of polymn. of 50-1500 having a cyanoethyl group and, if necessary, substituents with the cotal degree of substitution of 2.0-3.0 such as 1-5C alkyl, 1-10C acyl, 1-4C hydroxyalkyl, or 1-20C perfluoroacyl having a degree of substitution of 1.0 or below, respectively, dissolved in a volatile solvent such as acetone or cyclo hexane is formed into film by flow casting, etc., thus yielding a a thin resin film comprising a cyanoethylcellulose derivative having a uniform thickness within a range of 0.5-10mum and a transmittance in wavelengths of 350-500nm of 88% or more and that of 250-350nm of 80% or more.
申请公布号 JPH0461892(B2) 申请公布日期 1992.10.02
申请号 JP19840251291 申请日期 1984.11.28
申请人 DAICEL CHEM 发明人 KURODA TAKAYUKI;TAKAHASHI SHIGEYUKI;YAMAKI KAORU;NAMIKOSHI HAJIME
分类号 C08J5/18;G03F1/62;G03F7/20;H01L21/027;H01L21/30 主分类号 C08J5/18
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