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发明名称
GAS INLET STRUCTURE OF SEMICONDUCTOR PROCESS TUBE
摘要
申请公布号
KR0114989(Y1)
申请公布日期
1998.04.15
申请号
KR19940012330U
申请日期
1994.05.30
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
HEO, SANG-BUM;KIM, YONG-HWA
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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