摘要 |
PROBLEM TO BE SOLVED: To detect the correction value of a precise dislocation by calculating the absolute value of the differences for respective pixels between an objective pixel string and a pixel string obtained by shifting the objective pixel string by the prescribed number of pixels and comparing it with the pixel value of the corresponding pixel of an outline picture constituted of the outline of a reference picture. SOLUTION: The absolute value of the differences for the respective pixels between the objective pixel string and the pixel string obtained by shifting it by the prescribed pixels against the pixel string in a direction for correcting dislocation is calculated and it is compared with the pixel value of the corresponding pixel of the outline picture. Since the absolute value of the differences has the pixel exceeding the pixel value of the pixel in the outline picture, the objective pixel string is judged to be the pixel string where a pattern is not composed of repetitive components. The correction value of dislocation is detected from the evaluation numeric value of a matching degree when the position relation of the pixel string is changed in the direction of the string. Thus, it is eliminated that the pixel string containing only the part where the same pattern is repeated, namely, only the part of a periodical pattern is selected as the pixel string applied to dislocation correction. |