发明名称 POLYMER COMPOSITION AND PRODUCTION OF POLYMER
摘要 PROBLEM TO BE SOLVED: To obtain a polymer compsn. capable of forming an optical pattern having superior thermal stability, a low coefft. of thermal expansion, superior chemical stability, water and solvent resistances, a low dielectric constant, superior mechanical characteristics and adhesiveness and to produce a polymer in the compsn. SOLUTION: This polymer compsn. has a wt. average mol.wt. of about 1,000-100,000 and contains a polymer contg. several monomeric repeating units each having a 1st photosensitivity imparting substituent capable of crosslinking or chain-extending the polymer when the polymer is exposed with chemical rays and also contg. a 2nd heat sensitivity imparting substituent capable of further crosslinking or chain-extending the polymer when the polymer is exposed to about >=140 deg.C. The 1st and 2nd substituents are different from each other and the polymer has a specified structure.
申请公布号 JPH1097073(A) 申请公布日期 1998.04.14
申请号 JP19970233820 申请日期 1997.08.29
申请人 XEROX CORP 发明人 SMITH THOMAS W;TIMOTHY J FULLER;RAM S NARAN;LUCA DAVID J
分类号 B41J2/14;C08F2/46;C08F2/50;C08L101/02;G03F7/038;H01L21/027;(IPC1-7):G03F7/038 主分类号 B41J2/14
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