| 摘要 |
PROBLEM TO BE SOLVED: To provide a barrier plate that is excellent in resolution and high in dimensional accuracy by forming over a substrate a barrier plate material layer containing an ethylene-unsaturated-group-containing polymer compound and a photosensitive resin composition layer, and sandblasting a hardened film pattern. SOLUTION: A photosensitive resin composition layer 3 containing an ethylene-unsaturated group containing polymeric compound represented by the formula 1 is formed using, e.g. a photosensitive film, over a barrier plate material layer 2 formed over a substrate 1, the thickness of the layer 2 ranging between, e.g. 100 and 300μm. An example of the photosensitive film is a polyethylene terephthalate film 5 to 100μm thick, which is pressed against the substrate 1 while being heated to form a pattern of a hardened film 6 after exposure and development processes. By using the pattern of the hardened film 6 as an etching mask and performing sandblasting to remove the pattern of the hardened film 6, a bulkhead 7 is obtained which is excellent in resolution and sandblasting resistance, is refined, and is high in positional and dimensional accuracies. |
