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发明名称
摘要
申请公布号
JP2723313(B2)
申请公布日期
1998.03.09
申请号
JP19890283735
申请日期
1989.10.31
申请人
TOSHIBA KK
发明人
TAKEBUCHI MASATAKA
分类号
H01L21/8247;H01L27/10;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L27/115;H01L21/824
主分类号
H01L21/8247
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代理人
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