| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for measuring phase difference wherein the apparatus is compact and measurement accuracy is high. SOLUTION: Light from a light source 1 is led to a polarizer 2a and a phase plate 2b sequentially, the polarizer 2a and the phase plate 2b are placed at at least two different angle positions with an optic axis (z) as the center rotatably as a unit, polarized light 3 from the phase plate 2b is led to an object 4 to be inspected, polarized light 5 passing through the object 5 or reflected on the object 4 is led to an analyzer 6 placed rotatably with the optic axis (z) as the center, and a light detector 7 for measuring intensity of the light from the analyzer 6 is provided. Based on an output from the light detector 7, phase differenceϕ0 between two linear polarized light beams orthogonal to each other on transmission or reflection of the object 4 is measured.
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