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经营范围
发明名称
Electron source and electron beam apparatus
摘要
申请公布号
EP0660358(B1)
申请公布日期
1998.03.04
申请号
EP19940120288
申请日期
1994.12.21
申请人
CANON KABUSHIKI KAISHA
发明人
MITSUTAKE, HIDEAKI;NAKAMURA, NAOTO;SANO, YOSHIHISA
分类号
G06F3/147;H01J1/316;H01J29/84;H01J31/12;(IPC1-7):H01J1/30;H01J21/10;H01J3/40
主分类号
G06F3/147
代理机构
代理人
主权项
地址
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