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摘要
申请公布号
JP2721235(B2)
申请公布日期
1998.03.04
申请号
JP19890090237
申请日期
1989.04.10
申请人
FURUKAWA DENKI KOGYO KK
发明人
KOAIZAWA HISASHI;KOMURA YUKIO
分类号
C30B25/12;C30B25/14;H01L21/205;(IPC1-7):C30B25/14
主分类号
C30B25/12
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