| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer container which can transport wafers having large diameters and different thicknesses without any damage. SOLUTION: The wafer container 1 is made up of a resin part 2 of an anti- static closed foamed material having recesses in its upper and lower surfaces and buffering materials 3 disposed as fitted into the recesses of the resin part 2. At each of outer positions of the buffering materials 3 of the resin part 2, a projection 4 and recess 5 are provided for transversal shift. In this way, there can be provided a wafer container 1 which is light in weight and is made of anti-static resin in handling. A wafer is placed on a recess of a lower cover, the wafer container 1 stacked thereon, another wafer is placed on the buffering plate 3, and such procedure is repeated. In this way, there can be obtained stacked wafer containers 1 in which one wafer is located on the buffering material 3 of each wafer container 1 and a necessary number of wafers in total are enclosed and kept in the wafer containers 1.</p> |
