<p>The invention relates to a detector objective lens and a charged particle beam device with such a detector objective lens containing a main lens for focussing a charged particle beam on a specimen, which consists of a magnetic lens (60) and an electrostatic lens (61) and a detector (62) disposed in front of the magnetic lens (60) in the direction of the charged particle beam (2) for detecting the charged particles released at the specimen (8). An additional lens is provided for influencing the released charged particles, which generates an electrostatic and/or magnetic field and is disposed between the main lens and the detector, the fields of the main lens and said additional lens being substantially separated from each other. <IMAGE></p>
申请公布号
EP0821393(A1)
申请公布日期
1998.01.28
申请号
EP19960112017
申请日期
1996.07.25
申请人
ACT ADVANCED CIRCUIT TESTING GESELLSCHAFT FUER TESTSYSTEMENTWICKLUNG MBH
发明人
UEDA, KOSHI;IWAI, TOSHIMICHI;SCHOENECKER, GERALD, DR.;FROSIEN, JUERGEN, DR.