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发明名称
Automated semiconductor processing systems
摘要
申请公布号
EP0798762(A3)
申请公布日期
1998.01.07
申请号
EP19960308916
申请日期
1996.12.09
申请人
SEMITOOL, INC.
发明人
DAVIS, JEFFREY A.;CURTIS, GARY L.
分类号
H01L21/677;(IPC1-7):H01L21/00
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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