METHOD FOR DRY ETCHING,申请号JP19960149414-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	METHOD FOR DRY ETCHING
摘要
申请公布号	JPH09330912(A)	申请公布日期	1997.12.22
申请号	JP19960149414	申请日期	1996.06.11
申请人	HITACHI CABLE LTD	发明人	OKUBO HIROYUKI
分类号	C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Method for de-aerating and aerating fuel tank of motor vehicle provided in connection with filling of fuel tank, involves determining whether vehicle is placed nearer or at tank position by positioning system

Method for thickening thixotropic sludge for disintegrating activated sludge of biological sewerage system, involves carrying out microwave irradiation of sludge before mechanical sedimentation

Device for treating water e.g. tap water, comprises water inlet, water outlet, fluidization line arranged between the inlet and outlet, treatment line connected between the fluidization line and the outlet, and housing for the lines

Dishwasher comprises an air circulating rib fixed to a rinsing arm to circulate air in the rinsing chamber

Method for operating device in vehicle, involves projecting representation from control panels to operate device on projection surface in vehicle and operation of control panels is detected by user

Routing and resources allocating method for wireless telecommunication network communication, involves optimizing network and communication parameters using predefined communication parameters and optimized network parameters, respectively

Clamping nut i.e. axle center nut, for wheel bearing of motor vehicle, has projection arranged opposite to slot on part of outer peripheral surface of nut body, and axially aligned recess cooperating with projection

Planet bolt and/or bearing bolt arrangement for transmission of motor vehicle, allows central region of planet bolt/bearing bolt to be recessed, where bolt borehole is designed throughoutly or partly in ribbed and/or reinforced manner

Device e.g. for loosing pressed insulating material, has loosening tool having grid-like design so that its grid level can execute movement

Blind plug for coaxial cable, has lug integrally cast on portion of blind plug, where two ends of coaxial cable are connectable to blind plug such that separation of coaxial cable is possible for blocking information flow

Supplying electrode caps to automatic welding machines uses magazine filler comprising bar with rows of caps on holders on each side, row being inserted into groove in magazine and caps removed by stripper when filler is moved sideways

Light table for graphic design has two parallel cantilever arms with longitudinal groove(s) on upper surface, roller rotatably fixed between cantilever arms; printing or cutting tool can be held in sliding element movable in profile groove

Arrangement for optical control of the working result of a tool and/or optical guiding of a tool comprises a beam-splitting device and devices deviating beam paths onto a working field so that image fields enclose a field around the tool

Magnetostrictive position sensor for monitoring e.g. piston stroke in hydraulic system, has electromagnet designed such that electromagnet operates on magneto-resistive measurement system in active condition

Miracle pyramid for intensive cleaning of body, mind and soul by incense resin or essential oils, is made by putting together tubes, which form tetrahedron

Beer-mixed drink comprises strong beer that is bock beer or porter beer, and sugar syrup provided with artificially produced blue curacao taste

Thermal insulation mat for use with e.g. pot, as oven cloth and table mat, in e.g. airplane, has base made of flexible material, where material exhibits shape favoring load-carrying capacity and thermal insulation of base

Recording device for recording object e.g. plant, has projection lens producing image of object, where image and photo mixing detector are displaceable relative to each other in image plane by displacement device

Magnet actuator element for power generation for solenoid valve, has magnet sleeve, magnet core and spring element, which is arranged to produce spring force produced along longitudinal axis of magnet core

Hand operating cutter e.g. garden cutter, for e.g. flowers, has knife kit with knife and rotatable counter knife, where cutter is switchable into ratchet drive by deviation of operating handle against direction of cutter closing movement