| 摘要 |
<p>PROBLEM TO BE SOLVED: To facilitate monitor and control operation for a gas flow rate and prevent productivity from decreasing by providing a specific abnormal flow rate detecting means, an abnormal flow rate continuance detecting means, a mass-flow controller, etc. SOLUTION: An abnormal value is previously read out of an abnormal setting means 3 and an alarm value is read out of an alarm value setting means 5. Then the mass-flow meter 1 detects the gas flow rate. Then the abnormal flow rate detecting means 2 judges whether or not the gas flow rate is abnormal. When the gas flow rate value is abnormal, the abnormal flow rate continuance detecting means 6 detects abnormal flow rate continuance and when the abnormal flow rate continuance is longer than a specific value, the mass-flow controller 8 stops the gas from flowing to stop a film forming process and a gas cleaning process. An alarm device 7 generates an alarm when the gas flow rate reaches an alarm flow rate or when the abnormal flow rate continuance is less than the specific value.</p> |
