Wafer handler having a flexible pad

摘要

An improved wafer handler having a wafer chuck that properly picks up wafers from a wafer track of an ion implant machine is provided. The wafer handler comprises: an input arm having a wafer chuck and a wafer pad adjustably mounted to the wafer chuck. The wafer pad preferably has an oval shape. The wafer handler can pick up a horizontal wafer and set the wafer down on an angled surface. The oval shape, dimensions, flexible material and mounting screws of the wafer pad enable the pad to form a vacuum with the wafer and to properly handle the wafer. The wafer handler and wafer pad greatly reduce wafer breakage and damage to the implant machine from the broken wafers.