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发明名称
Verfahren und Gerät zum Prüfen der Gleichförmigkeit von Hybridisierungskugeln
摘要
申请公布号
DE69405915(D1)
申请公布日期
1997.11.06
申请号
DE19946005915
申请日期
1994.05.30
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE, PARIS, FR
发明人
CAILLAT, PATRICE, F-38130 ECHIROLLES, FR;PARAT, GUY, F-38130 ECHIROLLES, FR;NICOLAS, GERARD, F-38340 VOREPPE, FR
分类号
H01L21/60;G01B11/14;H01L21/66;H05K13/08;(IPC1-7):G01B11/14
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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