| 摘要 |
PROBLEM TO BE SOLVED: To provide an accuracy inspection implement capable of exactly recognizing the printing accuracy of a vacuum contact printing device for production of photomasks and the alignment accuracy of the inspection table of an alignment inspection device for photomasks, facilitating inspection work and easily recognizing the relative relations of the accuracy between the respective devices and between respective stages. SOLUTION: The accuracy inspection implement is composed of a pair of inspection standard plates depicted with inspection charts in plural positions corresponding to each other dispersedly over the entire surface of respective glass dry plates. The inspection charts 16, 18, 20 of the one inspection standard plate are formed to the shapes different from the inspection charts 22, 24, 26 of the other inspection standard plate. The detection of misalignment is made possible by combining both inspection charts. |
