Scanning probe microscope, semiconductor distortion sensor for use therein and manufacturing process for manufacture thereof

摘要

A cantilever is composed of a U-shaped cantilever arm portion and a support portion and a probe (not illustrated) for use in an AFM is provided at a forward end of the cantilever arm portion. The cantilever is constituted by an N type substrate and a P - diffusion region is formed in the surface of an inward side of the U-shaped portion. A pn junction is formed at the boundary between the P - diffusion region and the N type substrate. At the support portion, within the N type substrate region there are formed N + contact regions while, on the other hand, within the P - diffusion region there are formed P + contact regions.