| 摘要 |
PROBLEM TO BE SOLVED: To change the redressing procedures in accordance with the redressing procedures which are accumulated in conformity with each trend of failure measured in the stage of mass production. SOLUTION: In the process S1, a table which indicates the redressing procedures of faulty cells of a semiconductor element is initially set; next, in the process S2, faulty cells of the semiconductor element are retrieved; and in the process S4, the numbers of faulty cells in the row direction and the column direction are respectively counted. Using these numbers, the row priority processing of processes S6, S8 or the column priority processing of processes S7, S12 is selected in the process S5; and in the row priority processing and column priority processing, the redressing processing which replaces the faulty cells with redundancy circuits in the units of row and column is executed. In the case where no faulty cells vanish in the judgement of the process S9 and S13, the procedure of the table is renewed in the process S12 and thereby the results of redressing the faulty cells of the semiconductor element are accumulated in the table which indicates the redressing procedures. |
